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Facilities

Facilities

Nanoelectronics Lab (B14 Stinson-Remick Hall of Engineering)

The Nanoelectronics Lab is used for dc and ac characterization of devices and circuits, primarily those fabricated in the Notre Dame Nanofabrication Facility. Characterizations performed in this lab include dc current-voltage and impedance measurements of devices as a function of temperature, 65 to 200 ºC, and S-parameter measurements from 45 MHz to 110 GHz, also over temperature. The lab is equipped for pulsed capacitance transients and lock-in conductance-voltage measurements, resistivity and Hall-effect characterization, and on-wafer testing of circuits to 60 GHz.

The lab houses two Cascade Summit 11000 probe stations, each with 200 mm diameter temperature-controlled wafer chucks to enable on-wafer testing. Configured around these wafer chucks are an Agilent 8510XF network analyzer with 1 mm coax-to-coplanar probes, Agilent B1500 and 4155B semiconductor parameter analyzers, and an Agilent 4294A precision impedance analyzer. The Agilent 4294A has a 16452 impedance/permittivity fixture for the dielectric spectroscopy of fluids and the 16451B fixture for spectroscopy of solid dielectrics. The lab also has a Tektronix 370 curve tracer, an Anritsu 3680V Universal Test Fixture for dc to 60 GHz coax-to-microstrip and coplanar transmission lines, an Agilent 86100B wideband (65 GHz) oscilloscope, and a wide range of sources and test equipment.

Agilent 4155C Semiconductor Parameter Analyzer

Triaxial-guarding
10 fA and 2 uV resolution
Data sheet
User’s guide

Agilent 4294A Precision Impedance Analyzer

300 MQ to 500 MQ
40 Hz to 110 MHz
1 MHz and 1 mQ resolution
Operation Manual
Service manual
MOS Capacitor
Procedure

Agilent B1500 Semiconductor Parameter Analyzer

Agilent 8510XF Network Analyzer

S-parameter measurements
45 MHz to 110 GHz
1mm coax-to-coplanar probes
Operation and service manual

Agilent 86100B Oscilloscope

Bandwidth 65 GHz
Eye diagram analyzer
Time domain reflectometer/transmission
Quick start guide

Agilent 16542 Impedance permitivity fixture

Agilent 16542 Impedance/Permittivity Fixture

Dielectic spectroscopy of fluids

Agilent 16451B Impedance Fixture

Spectroscopy of solid dielectrics
Operation and service manual

Anritsu 3680V Universal Test Fixture

DC to 60 GHz
Coax-to-microstrip or coax-to-coplanar
Semiconductor or ceramic substrates
Data sheet
Operation and maintenance manual

Branson Sonicator 2510

Instruction manual

Bruker Dimension Icon AFM (in Glovebox)

Features ScanAsyst automatic image optimization technology
Instruction manual

Cascade Microtech Summit 12000 Semiautomatic Probe Station

Cascade Microtech Summit 11861 Probe Station

Variable Temperature (-65 to 200° C)
Nitrogen-enclosure
Sub-cm to 200nm diameter wafers or pieces
Data sheet: probe system
Data sheet: tungsten needle probes
Data sheet: ceramic blade probe tips
Data sheet: coaxial needle probes

Cascade Microtech PLC50 Cryogenic Probe Station

Instruction manual

Edwards RV12 Rotary Vane Pump

High throughput mode performance (big drop)
- Max displacement 17 cubic meter/hr
- Max permitted inlet pressure 375 Torr gauge
- Max permitted outlet pressure 150 Torr gauge
Gas ballast control low flow position I
- Ultimate pressure 30 mTorr
- Gas ballast flow 5 L/min
Instruction Manual

Energetiq EQ-77 Laser-Driven Light Source (LDLS™)

Internal photoemission (IPE) system
Laser-stimulated plasma excitation, CW emission
200-850 nm
Internal laser: 974 nm, ~25 mm at aperture, <36 mW via 7 mm measurement at aperture
Operations manual

Keithley 2636 Sourcemeter

Reference manual

Keithley 4200A-SCS Parameter Analyzer

Olympus BX51 Optical Microscope

Transmission and reflection
Brightfield and darkfield
Motorized nose piece
50x, 100x, 200x, 500x and 1000x magnifications using Plan Fluorite research-grace optics
Nomarski DIC
Rotatable 3" and 4" wafer storage
Digita Camera
Instruction manual