Facilities

Nanoelectronics Lab (B14 Stinson-Remick Hall of Engineering)

The Nanoelectronics Lab is used for dc and ac characterization of devices and circuits, primarily those fabricated in the Notre Dame Nanofabrication Facility. Characterizations performed in this lab include dc current-voltage and impedance measurements of devices as a function of temperature, 65 to 200 ºC, and S-parameter measurements from 45 MHz to 110 GHz, also over temperature. The lab is equipped for pulsed capacitance transients and lock-in conductance-voltage measurements, resistivity and Hall-effect characterization, and on-wafer testing of circuits to 60 GHz.

The lab houses two Cascade Summit 11000 probe stations, each with 200 mm diameter temperature-controlled wafer chucks to enable on-wafer testing. Configured around these wafer chucks are an Agilent 8510XF network analyzer with 1 mm coax-to-coplanar probes, Agilent B1500 and 4155B semiconductor parameter analyzers, and an Agilent 4294A precision impedance analyzer. The Agilent 4294A has a 16452 impedance/permittivity fixture for the dielectric spectroscopy of fluids and the 16451B fixture for spectroscopy of solid dielectrics. The lab also has a Tektronix 370 curve tracer, an Anritsu 3680V Universal Test Fixture for dc to 60 GHz coax-to-microstrip and coplanar transmission lines, an Agilent 86100B wideband (65 GHz) oscilloscope, and a wide range of sources and test equipment.

 

Agilent 4155 and 4294

Agilent 4155C Semiconductor Parameter Analyzer

Agilent 4294A Precision Impedance Analyzer

 

 

Agilent 8510xf Network analyzer

Agilent 8510XF Network Analyzer

 

 

Agilent 86100B Oscilloscope

Agilent 86100B Oscilloscope

  • Bandwidth 65 GHz
  • Eye diagram analyzer
  • Time domain reflectometer/transmission
  • Quick start guide

 

Agilent 16542 Impedance permitivity fixture

Agilent 16542 Impedance/Permittivity Fixture

  • Dielectic spectroscopy of fluids

Agilent 16451B Impedance Fixture

 

Anritsu 3680v Universal test fixture

Anritsu 3680V Universal Test Fixture

 

Branson Sonicator 2510

Branson Sonicator 2510

 

Bruker Icon AFM In Glovebox

Bruker Dimension Icon AFM (in Glovebox)

 

 

Cascade Summit 11861 Probe Station

Cascade Microtech Summit 11861 Probe Station

 

Cascade PLC50 Cryogenic Probe Station

Cascade Microtech PLC50 Cryogenic Probe Station

 

Energetiq Image

Energetiq EQ-77 Laser-Driven Light Source (LDLS™)

  • Internal photoemission (IPE) system
  • Laser-stimulated plasma excitation, CW emission
  • 200-850 nm
  • Internal laser: 974 nm, ~25 mm at aperture, <36 mW via 7 mm measurement at aperture
  • Operations manual

 

Keithley 2636 Sourcemeter

Keithley 2636 Sourcemeter

 

Keithley 4200a Scs Parameter Analyzer

Keithley 4200A-SCS Parameter Analyzer

 

Olympus BX51 Microscope

Olympus BX51 Optical Microscope

  • Transmission and reflection
  • Brightfield and darkfield
  • Motorized nose piece
  • 50x, 100x, 200x, 500x and 1000x magnifications using Plan Fluorite research-grace optics
  • Nomarski DIC
  • Rotatable 3" and 4" wafer storage
  • Digita Camera
  • Instruction manual

 

MBraun Glovebox Bruker Icon AFM

MBraun Glovebox

  • Gas: Argon
  • Glove ports: 5
  • Bays: 2 (AFM right; spin-coater left)
  • Oxygen concentration: <0.1 ppm
  • Water concentration: <0.1 ppm
  • Instruction manual

 

Mettler Toledo Balance ML104

Mettler Toledo Balance

 

Sorvall Legend X1 Centrifuge

Sorvall Legend X1 Centrifuge with Fiberlite Rotor (F15-8x50cy)

  • Type: Fixed Angle
  • Capacity: 8 x50 mL
  • Speed: 14,000 RPM;  –  22,000 xg
  • Radius: 104 mm
  • Instruction manual

 

SPS Spin Coater In Glovebox

Specialty Coating Systems Spin Coater (in Glovebox)

 

Tektronix 370 Curve Tracer

Tektronix 370A Curve Tracer

  • Up to 2000 V and 10 A sourcing
  • 220 watts
  • 1 nA resolution
  • 2 mV resolution
  • Waveform comparison and averaging
  • Kelvin sense measurements
  • Instruction manual

 

Ph Tektronixtds7254 Oscilloscope

Tektronix TDS7254 Oscilloscope

 

Tektronix AWG710 Arbitrary Waveform Generator

Tektronix AWG710 Arbitrary Waveform Generator

 

Toho Technology Hl9900

Toho Technology HL9900 Hall-Effect Measurement System

 

VWR Vacuum Oven

VWR Vacuum Oven

 

Witec Alpha300r Confocal Raman

WiTec Alpha300R confocal Raman microscope with photocurrent mapping capability