Facilities
Nanoelectronics Lab (B14 Stinson-Remick Hall of Engineering)
The Nanoelectronics Lab is used for dc and ac characterization of devices and circuits, primarily those fabricated in the Notre Dame Nanofabrication Facility. Characterizations performed in this lab include dc current-voltage and impedance measurements of devices as a function of temperature, 65 to 200 ºC, and S-parameter measurements from 45 MHz to 110 GHz, also over temperature. The lab is equipped for pulsed capacitance transients and lock-in conductance-voltage measurements, resistivity and Hall-effect characterization, and on-wafer testing of circuits to 60 GHz.
The lab houses two Cascade Summit 11000 probe stations, each with 200 mm diameter temperature-controlled wafer chucks to enable on-wafer testing. Configured around these wafer chucks are an Agilent 8510XF network analyzer with 1 mm coax-to-coplanar probes, Agilent B1500 and 4155B semiconductor parameter analyzers, and an Agilent 4294A precision impedance analyzer. The Agilent 4294A has a 16452 impedance/permittivity fixture for the dielectric spectroscopy of fluids and the 16451B fixture for spectroscopy of solid dielectrics. The lab also has a Tektronix 370 curve tracer, an Anritsu 3680V Universal Test Fixture for dc to 60 GHz coax-to-microstrip and coplanar transmission lines, an Agilent 86100B wideband (65 GHz) oscilloscope, and a wide range of sources and test equipment.
![Agilent 4155 and 4294](/assets/330995/ph_agilent4155_4294.jpg)
Agilent 4155C Semiconductor Parameter Analyzer
- Triaxial-guarding
- 10 fA and 2 uV resolution
- Data sheet
- User’s guide
Agilent 4294A Precision Impedance Analyzer
- 300 MQ to 500 MQ
- 40 Hz to 110 MHz
- 1 MHz and 1 mQ resolution
- Operation Manual
- Service manual
- MOS Capacitor
- Procedure
![Agilent b1500 Semiconductor parameter analyzer](/assets/333865/ph_agilentb1500_semiconductorparameteranalyzer.jpg)
![Agilent 8510xf Network analyzer](/assets/333866/ph_agilent8510xf_networkanalyzer.jpg)
Agilent 8510XF Network Analyzer
- S-parameter measurements
- 45 MHz to 110 GHz
- 1mm coax-to-coplanar probes
- Operation and service manual
![Agilent 86100B Oscilloscope](/assets/333868/ph_agilent86100b_oscilloscope.jpg)
Agilent 86100B Oscilloscope
- Bandwidth 65 GHz
- Eye diagram analyzer
- Time domain reflectometer/transmission
- Quick start guide
![Agilent 16542 Impedance permitivity fixture](/assets/333871/ph_agilent16542_impedpermitivityfixture.jpg)
Agilent 16542 Impedance/Permittivity Fixture
- Dielectic spectroscopy of fluids
Agilent 16451B Impedance Fixture
- Spectroscopy of solid dielectrics
- Operation and service manual
![Anritsu 3680v Universal test fixture](/assets/333874/ph_anritsu3680v_universaltestfixture.jpg)
Anritsu 3680V Universal Test Fixture
- DC to 60 GHz
- Coax-to-microstrip or coax-to-coplanar
- Semiconductor or ceramic substrates
- Data sheet
- Operation and maintenance manual
![Branson Sonicator 2510](/assets/334379/branson_sonicator_2510.jpg)
Branson Sonicator 2510
![Bruker Icon AFM In Glovebox](/assets/333936/ph_brukericonafm_in_glovebox.jpg)
Bruker Dimension Icon AFM (in Glovebox)
- Features ScanAsyst automatic image optimization technology
- Instruction manual
![Cascade Summit 12000 Autoprober](/assets/333937/ph_cascadesummit12000autoprober.jpg)
Cascade Microtech Summit 12000 Semiautomatic Probe Station
![Cascade Summit 11861 Probe Station](/assets/333938/ph_cascadesummit_11861probestation.jpg)
Cascade Microtech Summit 11861 Probe Station
- Variable Temperature (-65 to 200° C)
- Nitrogen-enclosure
- Sub-cm to 200nm diameter wafers or pieces
- Data sheet: probe system
- Data sheet: tungsten needle probes
- Data sheet: ceramic blade probe tips
- Data sheet: coaxial needle probes
![Cascade PLC50 Cryogenic Probe Station](/assets/333940/ph_cascadeplc50cryogenicprobestation.jpg)
Cascade Microtech PLC50 Cryogenic Probe Station
![Edwards Image](/assets/414943/edwards_rv12_pump.jpg)
Edwards RV12 Rotary Vane Pump
- High throughput mode performance (big drop)
- Max displacement 17 cubic meter/hr
- Max permitted inlet pressure 375 Torr gauge
- Max permitted outlet pressure 150 Torr gauge
- Gas ballast control low flow position I
- Ultimate pressure 30 mTorr
- Gas ballast flow 5 L/min
- Instruction Manual
![Energetiq Image](/assets/336107/energetic_eq_77_image.jpg)
Energetiq EQ-77 Laser-Driven Light Source (LDLS™)
- Internal photoemission (IPE) system
- Laser-stimulated plasma excitation, CW emission
- 200-850 nm
- Internal laser: 974 nm, ~25 mm at aperture, <36 mW via 7 mm measurement at aperture
- Operations manual
![Keithley 2636 Sourcemeter](/assets/389609/360x155/keithley_2636_sourcemeter.jpg)
Keithley 2636 Sourcemeter
![Keithley 4200a Scs Parameter Analyzer](/assets/383100/360x229/keithley_4200a_scs_parameter_analyzer.jpg)
Keithley 4200A-SCS Parameter Analyzer
![Olympus BX51 Microscope](/assets/333941/ph_olympusbx51microscope.jpg)
Olympus BX51 Optical Microscope
- Transmission and reflection
- Brightfield and darkfield
- Motorized nose piece
- 50x, 100x, 200x, 500x and 1000x magnifications using Plan Fluorite research-grace optics
- Nomarski DIC
- Rotatable 3" and 4" wafer storage
- Digita Camera
- Instruction manual
![MBraun Glovebox Bruker Icon AFM](/assets/333943/ph_mbraungloveboxbrukericonafm.jpg)
MBraun Glovebox
- Gas: Argon
- Glove ports: 5
- Bays: 2 (AFM right; spin-coater left)
- Oxygen concentration: <0.1 ppm
- Water concentration: <0.1 ppm
- Instruction manual
![Mettler Toledo Balance ML104](/assets/333945/ph_mettlertoledobalanceml104.jpg)
Mettler Toledo Balance
- Capacity: 120 g
- Accuracy: 0.1 mg
- Instruction manual
![Pfeiffer Turbopump on PLC 50 Cryoprober](/assets/430486/pfeiffer_turbomolecular_pump_cryoprober.jpg)
Pfeiffer Turbopump on PLC 50 cryoprober
![Solid State Cooling Systems UC160-190 Thermoelectric Chiller](/assets/435879/solidstatecooling_uc160_190_thermoelectric_chiller.jpg)
Solid State Cooling Systems UC160-190 Thermoelectric Chiller
This is the chiller for the Energetiq EQ-77 Laser-Driven Light Source.
![Sorvall Legend X1 Centrifuge](/assets/333949/ph_sorvalllegendx1centrifuge.jpg)
Sorvall Legend X1 Centrifuge with Fiberlite Rotor (F15-8x50cy)
- Type: Fixed Angle
- Capacity: 8 x50 mL
- Speed: 14,000 RPM; – 22,000 xg
- Radius: 104 mm
- Instruction manual
![SPS Spin Coater In Glovebox](/assets/333951/ph_spsspin_coater_in_glovebox.jpg)
Specialty Coating Systems Spin Coater (in Glovebox)
![Tektronix 370 Curve Tracer](/assets/333957/ph_tektronix370_curvetracer.jpg)
Tektronix 370A Curve Tracer
- Up to 2000 V and 10 A sourcing
- 220 watts
- 1 nA resolution
- 2 mV resolution
- Waveform comparison and averaging
- Kelvin sense measurements
- Instruction manual
![Ph Tektronixtds7254 Oscilloscope](/assets/333961/ph_tektronixtds7254_oscilloscope.jpg)
Tektronix TDS7254 Oscilloscope
- 4 channels
- 2.5 GHz bandwidth
- 5 GS/s
- User manual
![Tektronix AWG710 Arbitrary Waveform Generator](/assets/334048/ph_tektronixawg710_arbitrarywaveformgenerator.jpg)
Tektronix AWG710 Arbitrary Waveform Generator
- 4.0 GS/s
- 8-bit
- 16 M point
- User manual
![Temptronics image placeholder](/assets/414951/photo_placeholder.jpg)
Temptronics TPO3000 Thermo Chuck System
![Toho Technology Hl9900](/assets/389610/360x222/toho_technology_hl9900.jpg)
Toho Technology HL9900 Hall-Effect Measurement System
- Location: SR Bxx
- Specifications
![VWR Vacuum Oven](/assets/334050/ph_vwrvacuumoven.jpg)
VWR Vacuum Oven
![Witec Alpha300r Confocal Raman](/assets/389612/360x429/witec_alpha300r_confocal_raman.jpg)
WiTec Alpha300R confocal Raman microscope with photocurrent mapping capability
- Location: SR B20
- User manual