Facilities

Nanoelectronics Lab (B14 Stinson-Remick)
Alan Seabaugh

The Nanoelectronics Lab is used for dc and ac characterization of devices and circuits, primarily those fabricated in the Notre Dame Nanofabrication Facility. Characterizations performed in this lab include dc current-voltage and impedance measurements of devices as a function of temperature, 65 to 200 ºC, and S-parameter measurements from 45 MHz to 110 GHz, also over temperature. The lab is equipped for pulsed capacitance transients and lock-in conductance-voltage measurements, resistivity and Hall-effect characterization, and on-wafer testing of circuits to 60 GHz.

The lab houses two Cascade Summit 11000 probe stations, each with 200 mm diameter temperature-controlled wafer chucks to enable on-wafer testing. Configured around these wafer chucks are an Agilent 8510XF network analyzer with 1 mm coax-to-coplanar probes, Agilent B1500 and 4155B semiconductor parameter analyzers, and an Agilent 4294A precision impedance analyzer. The Agilent 4294A has a 16452 impedance/permittivity fixture for the dielectric spectroscopy of fluids and the 16451B fixture for spectroscopy of solid dielectrics. The lab also has a Tektronix 370 curve tracer, an Anritsu 3680V Universal Test Fixture for dc to 60 GHz coax-to-microstrip and coplanar transmission lines, an Agilent 86100B wideband (65 GHz) oscilloscope, and a wide range of sources and test equipment.

Index of lab equipment

Agilent 4155C – 4294A Semiconductor Parameter Analyzer

Agilent 4155C Semiconductor Parameter Analyzer

  • Triaxial -guarding
  • 10 fA and 2 uV resolution
  • Data sheet [pdf]
  • User’s guide [pdf]

Agilent 4294A Precision Impedance Analyzer

  • 300 MQ to 500 MQ
  • 40 Hz to 110 MHz
  • 1 mHz and 1 mQ resolution
  • Operation Manual [pdf]
  • Service manual [pdf]
  • MOS Capacitor [pdf]
  • Procedure [pdf]

Agilent B1500 Semiconductor Parameter Analyzer

Agilent B1500 Semiconductor Parameter Analyzer

  • User’s guide [pdf]
  • IV and CV measurement [pdf]
  • TFET AFS instructions [pdf]
  • Self-paced training manual – Part 1 [pdf]
  • Self-paced training manual – Part 2 [pdf]
  • Self-paced training manual – Part 3 [pdf]
  • Self-paced training manual – Part 4 [pdf]
  • Self-paced training manual – Part 5 [pdf]

 

 

 

 

 

Agilent 8510XF Network Analyzer

Agilent 8510XF Network Analyzer

  • S-parameter measurements
  • 45 MHz to 110 GHz
  • 1mm coax-to-coplanar probes
  • Operation and service manual [pdf]

 

 

 

 

 

Agilent 86100B Wide-Bandwidth Oscilloscope

  • Bandwidth 65 GHz
  • Eye diagram analyzer

    Agilent 86100B Wide-Bandwidth Oscilloscope

  • Time domain reflectometer/transmission
  • Quick start guide [pdf]

 

 

 

 

 

 

 

 

Agilent 16542 Impedance/Permittivity Fixture

  • Dielectic spectroscopy of fluids

 

Agilent 16451B Impedance Fixture

Agilent 16451B Impedance Fixture 

  • Spectroscopy of solid dielectrics
  • Operation and service manual [pdf]

 

 

 

 

 

 

 

 

 

 

Anritsu 3680V Universal Test Fixture

Anritsu 3680V Universal Test Fixture 

  • DC to 60 GHz
  • Coax-to-microstrip or coax-to-coplanar
  • Semiconductor or ceramic substrates
  • Data sheet [pdf]
  • Operationand maintennce manual [pdf]

 

 

 

 

 

 

 

Branson Sonicator 2510

Branson Sonicator 2510

 

 

 

 

 

 

 

 

Bruker Dimension Icon AFM (in Glovebox)

Bruker Dimension Icon AFM (In Glovebox)

  • Features ScanAsyst automatic image optimization technology
  • Instruction manual [pdf]

 

 

 

 

 

 

 

 

Cascade Microtech Summit 12000 Semiautomatic Probe Station

Cascade Microtech Summit 12000 Semiautomatic Probe Station

  • Nucleus manual [pdf]
  • Nucleus communications guide [pdf]
  • Wavevue tutorials [pdf]
  • Quick start guide AUTOXYZ Nucleus 4 [pdf]
  • Wavevue IV Module Guide [pdf]
  • Wavevue Installation Guide [pdf]
  • Demo notes [pdf]

 

 

 

 

 

 

 

 

Cascade Microtech Summit 11861 Probe Station

Cascade Microtech Summit 11861 Probe Station

  • Variable Temperature (-65 to 200° C)
  • Nitrogen-enclosure
  • Sub-cm to 200nm diameter wafers or pieces
  • Data sheet: probe system [pdf]
  • Data sheet: tungsten needle probes [pdf]
  • Data sheet: ceramic blade probe tips [pdf]
  • Data sheet: coaxial needle probes [pdf]

 

 

 

Cascade Microtech PLC50 Cryogenic Probe Station

Cascade Microtech PLC50 Cryogenic Probe Station

  • Instruction manual [pdf]

 

 

 

 

 

 

 

 

 

Olympus BX51 Optical Microscope

Olympus BX51 Optical Microscope

  • Transmission and reflection
  • Brightfield and darkfield
  • Motorized nose piece
  • 50x, 100x, 200x, 500x and 1000x magnifications using Plan Fluorite research-grace optics
  • Nomarski DIC
  • Rotatable 3″ and 4″ wafer storage
  • Digita Camera
  • Instruction manual [pdf]

 

 

MBraun Glovebox

MBraun Glovebox

  • Gas: Argon
  • Glove ports:5
  • Bays: 2(AFM right; spin-coater left)
  • Oxygen concentration:<0.1 ppm
  • Water concentration:<0.1 ppm
  • Instruction manual [pdf]

 

 

 

 

Mettler Toledo Balance

Mettler Toledo Balance

  • Capacity 120 g
  • Accuracy: 0.1 mg
  • Instruction manual [pdf]

 

 

 

 

 

 

 

 

 

 

Sorvall Legend X1 Centrifuge with Fiberlite Rotor (F15-8x50cy)

Sorval Legend X1 Centrifuge

  • Type: Fixed Angle
  • Capacity: 8 x50 mL
  • Speed: 14,000 RPM;  –  22,000 xg
  • Radius: 104mm
  • Instruction manual [pdf]

 

 

 

 

 

Specialty Coating Systems Spin Coater (in Glovebox) 

Specialty Coating Systems Spin Coater (In Glovebox)

  • Instruction manual [pdf]

 

 

 

 

 

 

 

 

 

 

Tektronix 370A Curve Tracer

Tektronix 370A Curve Tracer

  • Up to 2000 V and 10 A sourcing
  • 220 Watts
  • 1 nA resolution
  • 2mV resolution
  • Waveform comparison and averaging
  • Kelvin sense measurements
  • Instruction manual [pdf]

 

 

 

 

Tektronix TDS7254 Oscilloscope

Tektronix TDS7254 Oscilloscope

  • 4 channels
  • 2.5 GHz bandwidth
  • 5 GS/s
  • User manual [pdf]

 

 

 

 

 

Tektronix AWG710 Arbitrary Waveform Generator

Tektronix AWG710 Arbitrary Waveform Generator

  • 4.0 GS/s
  •  8-bit
  • 16 M point
  • User manual [pdf]

 

 

 

 

 

VWR Vacuum Oven

VWR Vacuum Oven

  • Instruction manual [pdf]

 

 

 

 

 

 

 

 

Lab Rules and Safety   

SR B14 Lab Safety Training Audio

SR B14 Chemical Inventory Form

SR B14 Chemical Inventory